The type of substrate can be determined by the C-V plot for the gate MOSFET. The given data (in HFCV_70%Hf.txt) are imported into the MatLab 2013a and the C-V characters is shown below:
Figure 1 C-V plot for the gate stacks
The figure indicates the relationship between high-frequency capacitance and voltage. The maximum capacitance occurs at gate voltage (V_g) at -1 V. The capacitance is 2.919 nF. The minimum capacitance occurs at gate voltage (V_g) at 2 V, the minimum capacitance is 53.4 pF. It can also be noticed that the capacitance of the gate decreases with the increasing gate voltage.
From the plot it can be noticed that the accumulation region appears with a negative gate voltage applied to the gate stack, while the depletion region appears with a positive gate voltage. Thus the substance should be p-type.
没有评论:
发表评论